MICROMECHANICAL TUNABLE FABRY-PEROT INTERFEROMETER AND A METHOD FOR PRODUCING THE SAME

The invention relates to controllable Fabry-Perot interferometers which are produced with micromechanical (MEMS) technology. Micromechanical interferometers of the prior art have a disadvantage of significantly attenuating infrared radiation. In the inventive solution there is a gap (104, 114) in at...

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Bibliographic Details
Main Author BLOMBERG, MARTTI
Format Patent
LanguageEnglish
French
Published 31.03.2011
Subjects
COLORIMETRY
MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT
MEASURING
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
RADIATION PYROMETRY
TESTING
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Summary:The invention relates to controllable Fabry-Perot interferometers which are produced with micromechanical (MEMS) technology. Micromechanical interferometers of the prior art have a disadvantage of significantly attenuating infrared radiation. In the inventive solution there is a gap (104, 114) in at least one mirror, serving as a layer of the mirror. The other layers of the mirrors can be made of polycrystalline silicon, which has a negligible attenuation at the infrared range. It is also preferable to provide a hole (125) or a recess in a substrate (130) at the optical area of the interferometer. L'invention concerne des interféromètres de Fabry-Pérot réglables produit selon une technologie micromécanique (MEMS). Les interféromètres micromécaniques existants ont l'inconvénient d'atténuer notablement le rayonnement infrarouge. La solution selon l'invention prévoit un intervalle (104, 114) dans au moins un miroir, qui sert de couche du miroir. Les autres couches des miroirs peuvent être en silicium polycristallin, présentant une atténuation négligeable dans la gemme infrarouge. Il est également préférable de prévoir un trou (125) ou une cavité dans un substrat (130) au niveau de la zone optique de l'interféromètre.
Bibliography:Application Number: WO2010FI50739