CHARGED PARTICLE BEAM MICROSCOPE AND MEASURING METHOD USING SAME

• Main Authors: YOTSUJI, TAKAFUMI, TSUNETA, RURIKO, KIKUCHI, HIDEKI
• Format: Patent
• Language: English; French; Japanese
• Published: 20.01.2011
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY

A charged particle beam device is equipped with a function of: obtaining an approximation function of a sample drift from a visual field shift amount among a plurality of images (S1); capturing a save image while correcting the drift on the basis of the approximation function (S2); and creating from...