IMPROVED ELECTRICALLY TUNABLE FABRY-PEROT INTERFEROMETER, AN INTERMEDIATE PRODUCT AN ELECTRODE ARRANGEMENT AND A METHOD FOR PRODUCING AN ELECTRICALLY TUNABLE FABRY-PEROT INTERFEROMETER

• Main Authors: KATTELUS, HANNU, BLOMBERG, MARTTI, PUURUNEN, RIIKKA
• Format: Patent
• Language: English; French
• Published: 05.08.2010
• Subjects: COLORIMETRY; MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT; MEASURING; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PHYSICS; RADIATION PYROMETRY; TESTING

The invention relates to electrically tunable Fabry-Perot interferometers which are produced with micromechanical (MEMS) technology. Producing interferometers with prior art processes includes costly and complicated production phases. Therefore, it has not been possible to apply interferometers in c...