INERTIAL SENSOR WITH DUAL CAVITY PACKAGE AND METHOD OF FABRICATION

lnertial sensor having a body with first and second cavities on opposite sides thereof, a sensing element in the first cavity, electronic circuitry in the second cavity, electrical conductors interconnecting the sensing element and the circuitry, and leads connected electrically to the circuitry and...

Full description

Saved in:
Bibliographic Details
Main Authors KNOWLES, STUART, JOHN, ANDERSON, ROBERT, ALBERT, BERGER, WILLIAM, PAUL, FRAZEE, MICHAEL, THOMAS, COLLINS, MARK, ANDREW, SMITH, THAD, W. (MARC), DRAGOTTI, VICTOR
Format Patent
LanguageEnglish
French
Published 08.04.2010
Subjects
ELECTRICITY
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
TRANSPORTING
Online AccessGet full text

Cover

More Information
Summary:lnertial sensor having a body with first and second cavities on opposite sides thereof, a sensing element in the first cavity, electronic circuitry in the second cavity, electrical conductors interconnecting the sensing element and the circuitry, and leads connected electrically to the circuitry and extending from the body for mounting the sensor and making connections with the circuitry. L'invention concerne un capteur inertiel dont le corps comporte, sur ses faces opposées, une première et une seconde cavité, un élément de détection dans la première cavité, des circuits électroniques dans la seconde cavité, des conducteurs électriques reliant l'élément de détection et les circuits, et des fils reliés électriquement aux circuits et dépassant du corps pour effectuer le montage du capteur et les connexions avec les circuits.
Bibliography:Application Number: WO2009US57436