RADIATION SOURCE, LITHOGRAPHIC APPARATUS, AND DEVICE MANUFACTURING METHOD

• Main Authors: YAKUNIN, ANDREY, MIKHAILOVICH, MOORS, JOHANNES, HUBERTUS, JOSEPHINA, SJAMENOK, LEONID, AIZIKOVITCH, BANINE, VADIM, YEVGENYEVICH
• Format: Patent
• Language: English; French
• Published: 18.02.2010
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; CINEMATOGRAPHY; ELECTROGRAPHY; GAMMA RAY OR X-RAY MICROSCOPES; HOLOGRAPHY; IRRADIATION DEVICES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES; MATERIALS THEREFOR; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; NANOTECHNOLOGY; NUCLEAR ENGINEERING; NUCLEAR PHYSICS; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; ORIGINALS THEREFOR; PERFORMING OPERATIONS; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOTOTHERWISE PROVIDED FOR; TRANSPORTING

A spectral purity filter is configured to transmit extreme ultraviolet (EUV) radiation and deflect or absorb non-EUV secondary radiation. In an embodiment, the spectral purity filter includes a body of material highly transmissive of EUV radiation and a layer of material highly reflective of non-EUV secondary radiation located on a radiation incident side of the body. In an embodiment, the spectral purity filter includes a body of material highly transmissive of EUV radiation and a layer of high emissivity material on an end of the body. L'invention concerne un filtre à pureté spectrale configuré pour émettre un rayonnement ultraviolet extrême (EUV) et dévier ou absorber le rayonnement secondaire non EUV. Dans un mode de réalisation, le filtre à pureté spectrale comprend un corps de matière hautement transmissive de rayonnement EUV et une couche de matière hautement réfléchissante de rayonnement secondaire non EUV qui se trouve sur un côté du corps incident au rayonnement. Dans un mode de réalisation, le filtre à pureté spectrale comprend un corps de matière hautement transmissive de rayonnement EUV et une couche de matière hautement émissive sur une extrémité du corps.