LAYER TRANSFER FOR LARGE AREA INORGANIC FOILS

• Main Authors: MOGAARD, MARTIN, E, SANDERS, WILLIAM, A, HIESLMAIR, HENRY, MORRIS, JULIO, E, HERNANDEZ, JACOB, A, MOSSO, RONALD, J, BAILEY, ROBERT, J
• Format: Patent
• Language: English; French
• Published: 07.01.2010
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SEMICONDUCTOR DEVICES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION; TECHNICAL SUBJECTS COVERED BY FORMER USPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS

Layer transfer approaches are described to take advantage of large area, thin inorganic foils formed onto a porous release layer. In particular, since the inorganic foils can be formed from ceramics and/or crystalline materials that do not bend a large amount, approaches are described to provide for gradual pulling along an edge to separate the foil from a holding surface along a curved surface designed to not excessively bend the foil such that the foil is not substantially damaged in the transfer process. Apparatuses are described to perform the transfer with a rocking motion or with a rotating cylindrical surface. Furthermore, stabilization of porous release layers can improve the qualities of resulting inorganic foils formed on the release layer. In particular, flame treatments can provide improved release layer properties, and the deposition of an interpenetrating stabilization composition can be deposited using CVD to stabilize a porous layer. L'invention porte sur des approches de transfert de couche pour tirer avantage de feuilles inorganiques minces, de grande surface, qui sont formées sur une couche antiadhésive poreuse. En particulier, dans la mesure où les feuilles inorganiques peuvent être formées à partir de céramiques et/ou de matériaux cristallins qui ne se courbent pas de façon importante, l'invention porte sur des approches qui permettent une traction progressive le long d'un bord pour séparer la feuille d'une surface de support le long d'une surface courbe conçue pour ne pas courber de façon excessive la feuille, de telle sorte que la feuille n'est pas sensiblement endommagée dans le processus de transfert. L'invention porte également sur des appareils pour effectuer le transfert avec un mouvement de balancement ou avec une surface cylindrique tournante. De plus, la stabilisation des couches antiadhésives poreuses peut améliorer les qualités des feuilles inorganiques résultantes formées sur la couche antiadhésive. En particulier, des traitements à la flamme peuvent permettre d'améliorer les propriétés de la couche antiadhésive et le dépôt d'une composition de stabilisation d'imprégnation peut être effectué à l'aide d'un dépôt chimique en phase vapeur (CVD) afin de stabiliser une couche poreuse.