METHOD AND DEVICE FOR SUPPLYING ELECTRICAL POWER

Method and device for supplying electrical power to a wafer that is at least partially submerged in a liquid. The device comprises : - a container filled with the liquid; - a transportation device comprising a wafer carrier device for transporting the wafer at least partially submerged through the l...

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Bibliographic Details
Main Authors SAUAR, ERIK, LUNDAHL, KARL, IVAR, STEEMAN, ROBERTUS, ANTONIUS
Format Patent
LanguageEnglish
French
Published 16.04.2009
Subjects
APPARATUS THEREFOR
BASIC ELECTRIC ELEMENTS
CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS
CHEMISTRY
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
ELECTROFORMING
ELECTROLYTIC OR ELECTROPHORETIC PROCESSES
MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
METALLURGY
PRINTED CIRCUITS
PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTIONOF COATINGS
SEMICONDUCTOR DEVICES
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Summary:Method and device for supplying electrical power to a wafer that is at least partially submerged in a liquid. The device comprises : - a container filled with the liquid; - a transportation device comprising a wafer carrier device for transporting the wafer at least partially submerged through the liquid; - a power supply device for supplying electrical power to the wafer. Cette invention concerne un procédé et un dispositif d'alimentation en énergie électrique d'une tranche qui est au moins partiellement submergée dans un liquide. Le dispositif comprend un contenant rempli du liquide, un dispositif de transport comprenant un dispositif de support de tranche conçu pour transporter la tranche au moins partiellement submergée à travers le liquide, un dispositif d'alimentation de la tranche en énergie électrique.
Bibliography:Application Number: WO2008NO00359