TRANSFER MECHANISM WITH MULTIPLE WAFER HANDLING CAPABILITY

• Main Authors: BARKER, DAVID, TABRIZI, FARZAD
• Format: Patent
• Language: English; French
• Published: 23.07.2009
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

An integrated robotic mechanism is disclosed for improving transport equipment, integrating an object movement with other functionalities such as alignment or identification. The disclosed integrated robot assembly can comprise a multiple end effector for moving a plurality of workpieces, a single e...