GLASS-CERAMIC AND GLASS-CERAMIC/CERAMIC COMPOSITE SEMICONDUCTOR MANUFACTURING ARTICLE SUPPORT DEVICES

• Main Authors: SERWAZI, MARCUS, R, BEALL, DOUGLAS, M, WONDRACZEK, LOTHAR, LINDER, MICHAEL, W
• Format: Patent
• Language: English; French
• Published: 12.03.2009
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; ARTIFICIAL STONE; BASIC ELECTRIC ELEMENTS; CEMENTS; CERAMICS; CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUSENAMELS; CHEMISTRY; CINEMATOGRAPHY; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS; CONCRETE; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; GLASS; HOLOGRAPHY; JOINING GLASS TO GLASS OR OTHER MATERIALS; LIME, MAGNESIA; MATERIALS THEREFOR; METALLURGY; MINERAL OR SLAG WOOL; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; REFRACTORIES; SEMICONDUCTOR DEVICES; SLAG; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS,MINERALS OR SLAGS; SURFACE TREATMENT OF GLASS; TREATMENT OF NATURAL STONE

Disclosed is an article support or handling material configured to support an article to be placed in a beam path of a radiation beam of a lithographic apparatus. The article support or handling material comprises a glass-ceramic material which exhibits a fracture toughness of greater than 1.5 MPa/m1/2, a thermal expansion of less than 1.0 10-6K-1, a thermal conductivity greater than about 3.5 W/(m.K), an elastic modulus of greater than 120 GPa, a high elastic-to-density ratio in excess of 40 GPa cm'/g, and a thermal stability coefficient = 0.25. In one embodiment this glass-ceramic material is a cordierite glass-ceramic material. L'invention porte sur un matériau de support ou de manipulation d'article configuré pour porter un article à placer dans un trajet de faisceau d'un faisceau de rayonnement d'un appareil de lithographie. Le matériau de support ou de manipulation d'article comporte un matériau en vitrocéramique qui présente une ténacité à la fracture de plus de 1,5 MPa/m1/2, une dilatation thermique de moins de 1,0 x 10-6 K-1, une conductivité thermique supérieure à environ 3,5W/(m.K), un module d'élasticité de plus de 120 GPa, un rapport élastique-à-densité élevé de plus de 40 GPa cm3/g, et un coefficient de stabilité thermique = 0,25. Dans un mode de réalisation, ce matériau vitrocéramique est un matériau vitrocéramique de cordiérite.