METHOD OF HYDRATING A CERAMIC SPRAY-COATING LAYER, METHOD OF MANUFACTURING AN ELECTROSTATIC CHUCK THAT USES THE HYDRATING METHOD, AND SUBSTRATE STRUCTURE AND ELECTROSTATIC CHUCK HAVING THE CERAMIC SPRAY-COATING LAYER FORMED USING THE HYDRATING METHOD

• Main Authors: YE, KYUNG-HWAN, JANG, KYUNG-IC, YUK, HYUN-MI, KIM, SAM-WOONG
• Format: Patent
• Language: English; French
• Published: 15.01.2009
• Subjects: APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL; BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; PERFORMING OPERATIONS; PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL; SEMICONDUCTOR DEVICES; SPRAYING OR ATOMISING IN GENERAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; TRANSPORTING

In a method of hydrating a ceramic spray-coating layer of an electrostatic chuck, water penetrates into pores and/or cracks of the ceramic spray-coating layer, and the penetrated water then reacts with the ceramic spray-coating layer to form hydroxide in the pores and/or cracks. As a result, the electrical characteristics and hydrophobicity of the ceramic spray-coating layer may be improved. L'invention concerne un procédé d'hydratation d'une couche de revêtement céramique obtenue par pulvérisation dans lequel de l'eau pénètre dans les pores et/ou dans les fissures de la couche de revêtement céramique obtenue par pulvérisation, puis une fois que l'eau a pénétré dans ces pores et/ou dans ces fissures, elle réagit avec ladite couche de revêtement céramique pour former un hydroxyde dans ces pores et/ou dans ces fissures. Ainsi, l'invention permet d'améliorer les caractéristiques électriques et le caractère hydrophobe de ladite couche de revêtement céramique.