SILICON OF PRISMATIC SHAPE AND PROCESS FOR PRODUCING THE SAME
A process for producing a silicon of prismatic shape according to an utterly novel technological principle; and a silicon of prismatic shape with high aspect ratio obtained thereby. There are sequentially performed the alignment configuration forming step of using a silicon wafer with face (110), fo...
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Main Authors | , , |
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Format | Patent |
Language | English French Japanese |
Published |
25.09.2008
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Subjects | |
Online Access | Get full text |
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