MEMS DIAPHRAGM STRUCTURE AND ITS FORMING METHOD

A diaphragm (14) is formed by using MEMS technique. The diaphragm (14) has a hinge structure. At least one of the hinge upper corner part and the hinge lower corner part of the diaphragm (14) is rounded. La présente invention concerne un diaphragme (14) fabriqué grâce à la technique des MEMS. Le dia...

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Bibliographic Details
Main Author MIYOSHI, YUICHI
Format Patent
LanguageEnglish
French
Japanese
Published 21.06.2007
Subjects
BASIC ELECTRIC ELEMENTS
DEAF-AID SETS
ELECTRIC COMMUNICATION TECHNIQUE
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS
MEASURING
MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
PHYSICS
PUBLIC ADDRESS SYSTEMS
SEMICONDUCTOR DEVICES
TESTING
TRANSPORTING
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Summary:A diaphragm (14) is formed by using MEMS technique. The diaphragm (14) has a hinge structure. At least one of the hinge upper corner part and the hinge lower corner part of the diaphragm (14) is rounded. La présente invention concerne un diaphragme (14) fabriqué grâce à la technique des MEMS. Le diaphragme (14) présente une structure articulée. La partie de coin supérieur d'articulation et/ou la partie de coin inférieur d'articulation du diaphragme (14) est/sont arrondie(s).
Bibliography:Application Number: WO2006JP315379