ANTI-REFLECTIVE COATINGS

Novel self-crosslinking polymers are provided which are useful in antireflective coatings to reduce outgassing. Cette invention concerne des polymères auto-réticulés convenant comme revêtements anti-réfléchissants propres à atténuer le phénomène de dégazage.

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Bibliographic Details
Main Authors ABDALLAH, DAVID, J, YIN, JIAN, NEISSER, MARK, O
Format Patent
LanguageEnglish
French
Published 10.05.2007
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
BASIC ELECTRIC ELEMENTS
CHEMISTRY
CINEMATOGRAPHY
COMPOSITIONS BASED THEREON
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
ELECTROGRAPHY
HOLOGRAPHY
MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVINGCARBON-TO-CARBON UNSATURATED BONDS
MATERIALS THEREFOR
METALLURGY
ORGANIC MACROMOLECULAR COMPOUNDS
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
SEMICONDUCTOR DEVICES
THEIR PREPARATION OR CHEMICAL WORKING-UP
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Summary:Novel self-crosslinking polymers are provided which are useful in antireflective coatings to reduce outgassing. Cette invention concerne des polymères auto-réticulés convenant comme revêtements anti-réfléchissants propres à atténuer le phénomène de dégazage.
Bibliography:Application Number: WO2006IB03074