DELIVERING PARTICULATE MATERIAL TO A VAPORIZATION ZONE

• Main Authors: WEXLER, RONALD, MYRON, LONG, MICHAEL
• Format: Patent
• Language: English; French
• Published: 03.05.2007
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

It is an object of the present invention to provide an effective way of replenishing particulate material for vaporization. This object is achieved by a method for delivering material into a deposition chamber having a vaporization zone to vaporize such material to form a layer. The improvement includes providing a cartridge defining a cavity for receiving material under a controlled environment for preventing material contamination, receiving material from the cavity and translating such received material along a feed path to the vaporization zone and removably securing the cartridge to the deposition chamber. L'invention concerne une manière efficace de réapprovisionnement en matériau particulaire destiné à la vaporisation, ce que l'on réalise par le biais d'un procédé de distribution de matériau dans une chambre de dépôt dotée d'une zone de vaporisation destinée à vaporiser ledit matériau de façon à former une couche. L'amélioration consiste notamment à fournir une cartouche définissant une cavité qui reçoit le matériau en atmosphère contrôlée, ce qui empêche sa contamination, à recevoir, en provenance de la cavité, ledit matériau, à le transporter le long d'un chemin d'alimentation vers la zone de vaporisation et à fixer amovible la cartouche à la chambre de dépôt.