FABRICATION OF INLET AND OUTLET CONNECTIONS FOR MICROFLUIDIC CHIPS

The invention relates to a method of making a fluid communication channel between a micro mechanical structure provided on a front side of a device and the back side of said device. It comprises making the required structural components by lithographic and etching processes on said front side. Holes...

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Bibliographic Details
Main Author KAELVESTEN, EDVARD
Format Patent
LanguageEnglish
French
Published 19.04.2007
Subjects
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
TRANSPORTING
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Summary:The invention relates to a method of making a fluid communication channel between a micro mechanical structure provided on a front side of a device and the back side of said device. It comprises making the required structural components by lithographic and etching processes on said front side. Holes are then drilled from the back side of said device in precise alignment with the structures on said front side, to provide inlets and/or outlets to and/or from said micromechanical structure. La présente invention concerne un procédé de fabrication d'un canal de communication de fluide entre une structure micromécanique disposée sur le côté avant d'un dispositif et le côté arrière dudit dispositif. Le procédé consiste à fabriquer les composants structurels requis par des processus lithographiques et de gravure sur ledit côté avant. Des trous sont ensuite percés à partir du côté arrière dudit dispositif en un alignement précis avec les structures sur ledit côté avant, afin de définir des admissions et/ou évacuations vers et/ou depuis ladite structure micromécanique.
Bibliography:Application Number: WO2006SE50381