THIN-FILM PIEZOELECTRIC RESONATOR AND FILTER CIRCUIT

• Main Authors: ITAYA, KAZUHIKO, YASUMOTO, TAKAAKI, SANO, KENYA, YANASE, NAOKO, OHARA, RYOICHI
• Format: Patent
• Language: English; French
• Published: 01.03.2007
• Subjects: BASIC ELECTRONIC CIRCUITRY; ELECTRICITY; IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS

A thin-film piezoelectric resonator includes: a lower electrode (11) provided on the principal surface of the substrate (10) so as to cover the cavity (14); a piezoelectric film (12) provided on the lower electrode (11) so as to be located above the cavity (14); and an upper electrode (13). The uppe...