METHOD AND APPARATUS FOR FORMING METAL FILM

• Main Authors: TAKAGI, DAISUKE, FUKUNAGA, YUKIO, WANG, XINMING, TASHIRO, AKIHIKO, FUKUNAGA, AKIRA, OWATARI, AKIRA
• Format: Patent
• Language: English; French; Japanese
• Published: 16.03.2006
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SEMICONDUCTOR DEVICES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

By a metal film forming method, metal films having different film qualities can be continuously formed in a film thickness direction by using a same treatment solution. A board whereupon an embedded wiring is formed in a wiring recessed part on a surface is prepared, and while bringing the board surface into contact with the treatment solution, a relative flow status of the treatment solution on the board surface is changed, and the metal films having different film qualities are continuously formed in the film thickness direction on the wiring surface. Grâce à un procédé de formation de film métal, on peut obtenir en continu des films métalliques de différentes qualités de film dans un sens d'épaisseur de film en utilisant la même solution de traitement. On élabore une carte sur laquelle est formé un câblage incrusté dans une pièce rétreinte de câblage sur une surface, et tout en mettant la surface de la carte en contact avec la solution de traitement, on modifie un statut d'écoulement relatif de la solution de traitement sur la surface de la carte, et l'on obtient en continu les films métalliques aux différentes qualités de film dans le sens d'épaisseur de film à la surface du câblage.