FLUID CONTROLLER
A fluid introducing section (10) comprises first to n-th lower stage passage blocks (12A, 12) arranged in one row, first to (n-1)th upper stage passage blocks (13, 13A, 13B) arranged across two adjacent lower stage passage blocks (12A, 12), process gas introduction piping (14) connected to the inlet...
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Main Authors | , |
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Format | Patent |
Language | English French Japanese |
Published |
17.11.2005
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Edition | 7 |
Subjects | |
Online Access | Get full text |
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