FLUID CONTROLLER

A fluid introducing section (10) comprises first to n-th lower stage passage blocks (12A, 12) arranged in one row, first to (n-1)th upper stage passage blocks (13, 13A, 13B) arranged across two adjacent lower stage passage blocks (12A, 12), process gas introduction piping (14) connected to the inlet...

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Bibliographic Details
Main Authors KOYOMOGI, MUTSUNORI, TAKEUCHI, KAZUAKI
Format Patent
LanguageEnglish
French
Japanese
Published 17.11.2005
Edition7
Subjects
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