CONTROLLER AND METHOD TO MEDIATE DATA COLLECTION FROM SMART SENSORS FOR FAB APPLICATIONS

• Main Authors: LEV-AMI, UZI, SIFNATSCH, GUENTER, ATTWOOD, MARK
• Format: Patent
• Language: English; French
• Published: 27.10.2005
• Edition: 7
• Subjects: CALCULATING; CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS; COMPUTING; CONTROL OR REGULATING SYSTEMS IN GENERAL; CONTROLLING; COUNTING; ELECTRIC DIGITAL DATA PROCESSING; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS; PHYSICS; REGULATING; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS; TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE

The present invention relates to control of and data collection from sensors associated with tools. In particular, it relates to using a controller to mediate communications among a tool, sensors associated with the tool and data users, such as a host system or distributed processors. Particular aspects of the present invention are described in the claims, specification and drawings. La présente invention concerne la gestion et la collecte de données à partir de capteur associés à des outils. Elle permet en particulier d'induire des communications entre un outil, des capteurs associés à cet outil et des utilisateurs, tels qu'un système hôte ou des processeurs distribués. Des aspects particuliers de l'invention sont décrits dans les revendications, spécifications et figures.