METAL COMPLEX COMPRISING beta-DIKETONATO AS LIGAND

• Main Authors: SAKURAI, HIROYUKI, KADOTA, TAKUMI, KANATO, HIROKI, WATANUKI, KOUHEI, HASEGAWA, CHIHIRO
• Format: Patent
• Language: English; French; Japanese
• Published: 22.09.2005
• Edition: 7
• Subjects: ACYCLIC OR CARBOCYCLIC COMPOUNDS; ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAININGELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN,SULFUR, SELENIUM OR TELLURIUM; BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; ORGANIC CHEMISTRY; SEMICONDUCTOR DEVICES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

[PROBLEMS] To provide a metal complex capable of being suitably used for manufacturing a metal-containing thin film by the CVD method and a method for manufacturing a metal-containing thin film. [MEANS FOR SOLVING PROBLEMS] A metal complex comprising a beta-diketonato having an alkoxyalkylmethyl group, as a ligand; and a method for manufacturing a metal-containing thin film using the above metal complex by the CVD method. [PROBLÈMES] Fournir un complexe de métal capable d'être utilisé de façon appropriée pour la fabrication d'un film mince contenant du métal par le procédé de CVD et un procédé pour la fabrication d'un film mince contenant du métal. [MOYENS POUR RÉSOUDRE LES PROBLÈMES] Complexe de métal comprenant un beta-dicétonato ayant un groupe alcoxyalkylméthyle, comme ligand ; et procédé pour la fabrication d'un film mince contenant du métal utilisant le complexe de métal ci-dessus par le procédé de CVD.