PHOTOSENSITIVE POLYMER COMPOSITION, PROCESS FOR PRODUCING PATTERN, AND ELECTRONIC PART

• Main Authors: TSUMARU, YOSHIKO, KOMATSU, HIROSHI, OOE, MASAYUKI, KAWASAKI, DAI, UENO, TAKUMI, KATOU, KOUJI
• Format: Patent
• Language: English; French; Japanese
• Published: 28.07.2005
• Edition: 7
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; CHEMISTRY; CINEMATOGRAPHY; COMPOSITIONS BASED THEREON; COMPOSITIONS OF MACROMOLECULAR COMPOUNDS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; HOLOGRAPHY; MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONSONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS; MATERIALS THEREFOR; METALLURGY; ORGANIC MACROMOLECULAR COMPOUNDS; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; SEMICONDUCTOR DEVICES; THEIR PREPARATION OR CHEMICAL WORKING-UP; USE OF INORGANIC OR NON-MACROMOLECULAR ORGANIC SUBSTANCES ASCOMPOUNDING INGREDIENTS

A photosensitive polymer composition which comprises (a) a polyamide having repeating units represented by the following general formula (I): [Chemical formula (1)] (wherein U represents a tetravalent organic group; V represents a divalent organic group; and p is an integer indicating the number of the repeating units), (b) a compound which generates an acid by the action of light, and (c) a compound represented by the following general formula (II): [Chemical formula 2] (wherein m and n each independently is 1 or 2; R's each independently represents hydrogen, alkyl, or acyl; and R and R each independently represents C1-3 fluoroalkyl). L'invention concerne une composition polymère photosensible comportant (a) un polyamide présentant des unités récurrentes de formule générale (I): où U représente un groupe organique tétravalent, V représente un groupe organique divalent, p est un entier représentant le nombre d'unités récurrentes, (b) un composé créant un acide sous l'action de la lumière et (c) un composé de formule générale (II): où m et n sont chacun indépendamment 1 ou 2; tous les R représentent chacun indépendamment hydrogène, alkyle ou acyle et R1 et R2 représentent chacun indépendamment C1-3 fluoroalkyle.