APPLICATIONS OF SEMICONDUCTOR NANO-SIZED PARTICLES FOR PHOTOLITHOGRAPHY

• Main Authors: FLEET, ERIN, F, COOPER, GREGORY, CHEN, ZHIYUN
• Format: Patent
• Language: English; French
• Published: 02.02.2006
• Edition: 7
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; CINEMATOGRAPHY; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; HOLOGRAPHY; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES; MATERIALS THEREFOR; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; NANOTECHNOLOGY; ORIGINALS THEREFOR; PERFORMING OPERATIONS; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; SEMICONDUCTOR DEVICES; SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; TRANSPORTING

Semiconductor nano-sized particles possess unique optical properties, which make them ideal candidates for various applications in the UV photolithography. In this patent several such applications, including using semiconductor nano-sized particles or semiconductor nano-sized particle containing mateirals as highly refractive medium in immersion lithography, as anti-reflection coating in optics, as pellicle in lithography and as sensitizer in UV photoresists are described. Les nanoparticules semi-conductrices ont des propriétés optiques uniques qui en font les candidates idéales pour diverses applications en photolithographie UV. Cette invention concerne plusieurs applications de ce type, y compris l'utilisation de nanoparticules semi-conductrices ou de matériaux contenant des nanoparticules semi-conductrices en tant qu'agent hautement réfringent en lithographie par immersion, comme revêtement antireflet en optique, comme pellicule en lithographie et en tant que sensibilisateur dans les agents photorésistants aux UV.