PLASMA PRODUCING ELECTRODE AND PLASMA REACTOR

A plasma producing electrode comprises two or more plate-shaped unit electrodes (2) opposed to each other and having rectangular surfaces and four edge surfaces and a holding member (5) holding the unit electrodes (2) at least at one edge (fixed edge (6)) of one set of parallel edges (one set of edg...

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Bibliographic Details
Main Authors FUJIOKA, YASUMASA, MASUDA, MASAAKI, KONDO, ATSUO
Format Patent
LanguageEnglish
French
Japanese
Published 24.03.2005
Edition7
Subjects
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Summary:A plasma producing electrode comprises two or more plate-shaped unit electrodes (2) opposed to each other and having rectangular surfaces and four edge surfaces and a holding member (5) holding the unit electrodes (2) at least at one edge (fixed edge (6)) of one set of parallel edges (one set of edges) out of the four edges corresponding to the four edge surfaces of each unit electrode (2). At least one of the opposed unit electrodes (2) is a conductive film-coated electrode (8) having a ceramic body (3) and a conductive film (4). In respect of the other set of parallel edges (the other set of edges (9)) adjacent to the above one set of edges out of the four edges of the conductive film-coated electrode (8), the distance a (mm) from the end of the conductive film (4) to the end of the ceramic body (3) and the thickness c (mm) of the ceramic body (3) satisfy the relations (c/2)<=a<=5c. Damages from thermal shock can effectively be prevented. L'invention porte sur une électrode productrice de plasma comprenant: deux ou plus de deux électrodes plates (2) opposées l'une à l'autre et formant des unités, et présentant des surfaces rectangulaires et les surfaces de leurs quatre bords; ainsi que des supports (5) maintenant les électrodes (2) par au moins l'un des surfaces de leurs bords. L'une au moins des unités d'électrodes (2) présente un corps de céramique (3) revêtu d'un film conducteur (4). La distance a (mm) de l'extrémité du film conducteur (4) à l'extrémité du corps céramique (3), et l'épaisseur (c) du corps céramique satisfont à la relation (c/2) </= a </= 5c. On peut ainsi prévenir efficacement les dommages dus aux chocs thermiques.
Bibliography:Application Number: WO2004JP13211