IMAGE SENSOR AND METHOD FOR FORMING ISOLATION STRUCTURE FOR PHOTODIODE

• Main Authors: MATSUMOTO, YUJI, SAWASE, KENSUKE, SAWA, KIYOTAKA
• Format: Patent
• Language: English; French; Japanese
• Published: 06.01.2005
• Edition: 7
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

An image sensor is disclosed which comprises a plurality of photodiodes and device isolation regions. The photodiodes are arranged along the surface of a semiconductor substrate, and each photodiode has a first region of a first conductivity type formed along the semiconductor substrate, a second re...