SUPPORTING UNIT, AND MOVING TABLE DEVICE AND LINEAR-MOTION GUIDING DEVICE USING THE SUPPORTING UNIT

• Main Authors: UMETSU, SHIGEHIRO, UCHIDA, KOJI, SHIMOYAMA, TATSURO
• Format: Patent
• Language: English; French; Japanese
• Published: 06.01.2005
• Edition: 7
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; BEARINGS; BLASTING; CINEMATOGRAPHY; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT; CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILSOF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR; DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; ELEMENTS OR CRANKSHAFT MECHANISMS; ENGINEERING ELEMENTS AND UNITS; FLEXIBLE SHAFTS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS; HEATING; HOLOGRAPHY; INSTRUMENT DETAILS; LIGHTING; MACHINE TOOLS; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS; MATERIALS THEREFOR; MECHANICAL ENGINEERING; METAL-WORKING NOT OTHERWISE PROVIDED FOR; ORIGINALS THEREFOR; PERFORMING OPERATIONS; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; SEMICONDUCTOR DEVICES; SHAFTS; THERMAL INSULATION IN GENERAL; TRANSPORTING; WEAPONS

A supporting unit in a moving table device, capable of being easily connected between a base and a table. A supporting unit (Ualpha) has a pair of planar bearing plates (31a, 31b). Inside the planar bearing plates (31a, 31b) are arranged spherical bearing plates (34a, 34b), respectively. Further, a spherical shaft (35) is provided and held between the spherical bearing plates (34a, 34b). A planar bearing is formed between each of the planar bearing plates (31a, 31b) and each of the spherical bearing plates (34a, 34b), and a spherical bearing is formed between each of the spherical bearing plates (34a, 34b) and the spherical shaft (35), providing the supporting unit (Ualpha) with a certain degree of freedom in five-axis directions. Because the freedom is high, the supporting unit (Ualpha) can be easily connected between a base and a table. Une unité support dans un dispositif de plateau mobile, se montant facilement entre une base et un plateau. L'unité support (U alpha ) est pourvue d'un ensemble de deux plateaux à paliers plans (31a, 31b). Des plateaux à paliers sphériques (34a, 34b) sont agencés à l'intérieur de chacun des plateaux à paliers plans (31a, 31b). En outre, un arbre sphérique (35) est monté et retenu entre les plateaux à paliers sphériques (34a, 34b). Un palier plan est réalisé entre chacun des plateaux à paliers plans (31a, 31b) et chacun des plateaux à paliers sphériques (34a, 34b), un palier sphérique étant réalisé entre chacun des plateaux à paliers sphériques (34a, 34b) et l'arbre sphérique (35), ce qui donne à l'unité support (U alpha ) un certain degré de liberté selon cinq axes. Etant donné que le degré de liberté est élevé, l'unité support (U alpha ) peut facilement se monter entre une base et un plateau.