FILM FORMING METHOD AND APPARATUS

• Main Authors: YOSHIDA, NAOMI, YARITA, HIROYUKI, WADA, YUICHI, AIDA, HISASHI
• Format: Patent
• Language: English; French; Japanese
• Published: 30.09.2004
• Edition: 7
• Subjects: APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL; APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL; BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; PERFORMING OPERATIONS; PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL; SEMICONDUCTOR DEVICES; SPRAYING OR ATOMISING IN GENERAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; TRANSPORTING

A film forming apparatus characterized by comprising supply means (28) for supplying an organometallic compound-containing liquid of which the main component is an organometallic compound from which a film forming material is precipitated by pyrolytic reaction, coating means (126) for containing liquid supplied, and heating means (52) for heating the coated object to a predetermined temperature, the coating means (126) being capable of containing the organometallic compound-containing liquid and equipped with a coating liquid-containing body (100) which can be brought into contact with the object and separated therefrom. L'invention concerne un procédé de formation de film se caractérisant en ce qu'il comprend un moyen d'alimentation (28) conçu pour fournir un liquide contenant un composé organométallique dont le composant principal est un composé organométallique à partir duquel une matière filmogène est précipitée par réaction pyrolytique, un moyen d'enduction (126) pour enduire un objet (W) dudit liquide contenant un composé organométallique fourni, et un moyen de chauffage (52) pour porter l'objet enduit à une température prédéterminée, le moyen d'enduction (126) étant capable de contenir le liquide contenant un composé organométallique et étant équipé d'un corps (100) contenant le liquide d'enduction, pouvant être mis en contact avec l'objet et séparé de celui-ci.