VACUUM ULTRAVIOLT RAY BONDING APPARATUS

• Main Author: ONUKI, HIDEO
• Format: Patent
• Language: English; French; Japanese
• Published: 16.09.2004
• Edition: 7
• Subjects: ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; ADHESIVES; BASIC ELECTRIC ELEMENTS; CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUSENAMELS; CHEMISTRY; DYES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GLASS; JOINING GLASS TO GLASS OR OTHER MATERIALS; METALLURGY; MINERAL OR SLAG WOOL; MISCELLANEOUS APPLICATIONS OF MATERIALS; MISCELLANEOUS COMPOSITIONS; NATURAL RESINS; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; PAINTS; POLISHES; SEMICONDUCTOR DEVICES; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS,MINERALS OR SLAGS; SURFACE TREATMENT OF GLASS; USE OF MATERIALS AS ADHESIVES

A vacuum ultraviolet bonding apparatus for adhering material alkoxide to the bonded surface of bonded substances and radiating vacuum ultraviolet on the adhered surface for bonding, comprising a vacuum ultraviolet ray source part having a light source generating vacuum ultraviolet ray, a radiation c...