METHOD AND APPARATUS FOR CLEANING AN ANALYTICAL INSTRUMENT WHILE OPERATING THE ANALYTICAL INSTRUMENT

• Main Authors: YAIR, ITZAK, PARRAN, SHACHAR
• Format: Patent
• Language: English; French
• Published: 29.07.2004
• Edition: 7
• Subjects: APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]; BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY; MEASURING; PHYSICS; SCANNING-PROBE TECHNIQUES OR APPARATUS; TESTING

A method and apparatus for cleaning an analytical instrument while operating the analytical instrument are described. In one embodiment, a method comprises evacuating hydrocarbons from a specimen chamber (4) of an analytical instrument into a plasma chamber (90) via a mesh (92). The plasma is ignite...