METHOD AND APPARATUS FOR CLEANING AN ANALYTICAL INSTRUMENT WHILE OPERATING THE ANALYTICAL INSTRUMENT

A method and apparatus for cleaning an analytical instrument while operating the analytical instrument are described. In one embodiment, a method comprises evacuating hydrocarbons from a specimen chamber (4) of an analytical instrument into a plasma chamber (90) via a mesh (92). The plasma is ignite...

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Bibliographic Details
Main Authors YAIR, ITZAK, PARRAN, SHACHAR
Format Patent
LanguageEnglish
French
Published 29.07.2004
Edition7
Subjects
APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
MEASURING
PHYSICS
SCANNING-PROBE TECHNIQUES OR APPARATUS
TESTING
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Summary:A method and apparatus for cleaning an analytical instrument while operating the analytical instrument are described. In one embodiment, a method comprises evacuating hydrocarbons from a specimen chamber (4) of an analytical instrument into a plasma chamber (90) via a mesh (92). The plasma is ignited in the plasma chamber to react with the hydrocarbons. L'invention concerne un procédé et un appareil permettant de nettoyer un instrument analytique, pendant le fonctionnement dudit instrument. Dans un mode de réalisation, un procédé consiste à évacuer des hydrocarbures provenant d'une chambre de spécimen (4) d'un instrument analytique dans une chambre à plasma (90) via une maille (92). Le plasma est enflammé dans la chambre à plasma de manière à réagir avec les hydrocarbures.
Bibliography:Application Number: WO2003US29396