METHOD FOR CLEANING A PROCESS CHAMBER

• Main Authors: JOHNSON, ANDREW, KESSLER, HANS-GEORG, WINZIG, HUBERT, SCHREIBER, KAI-ALEXANDER, SISTERN, MARK, IAN, NOWIK, OREST, HOECKELE, UWE
• Format: Patent
• Language: English; French; German
• Published: 17.06.2004
• Edition: 7
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; CLEANING; CLEANING IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLICMATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASSC23 AND AT LEAST ONEPROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25; NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; PERFORMING OPERATIONS; PREVENTION OF FOULING IN GENERAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; TRANSPORTING

Erläutert wird ein Verfahren zum Reinigen einer Prozesskammer (10) in einer Reinigungsbetriebsart. Zur Reinigung werden fluorhaltige Verbindungen (G1) und Zusatzverbindungen (G2) eingesetzt. Das Verfahren ermöglicht eine preiswerte und umweltschonende Reinigung der Prozesskammer (10). The invention relates to a method for cleaning a process chamber (10) in a cleaning mode. Fluorine-containing compounds (G1) and additional compounds (G2) are used for cleaning. The inventive method allows for inexpensive and environmentally friendly cleaning of the process chamber (10). L'invention concerne un procédé de nettoyage d'une chambre de processus (10) dans un mode de nettoyage. Des composés fluorés (G1) et des composés additionnels (G2) sont employés pour le nettoyage. Le procédé selon l'invention permet de réaliser un nettoyage économique et écologique de la chambre de processus (10).