SUBSTRATE HOLDING DEVICE AND SUBSTRATE INSPECTION DEVICE

• Main Authors: YASUDA, MAMORU, FUJISAKI, NOBUO
• Format: Patent
• Language: English; French; Japanese
• Published: 11.12.2003
• Edition: 7
• Subjects: BASIC ELECTRIC ELEMENTS; DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; FREQUENCY-CHANGING; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; NON-LINEAR OPTICS; OPTICAL ANALOGUE/DIGITAL CONVERTERS; OPTICAL LOGIC ELEMENTS; OPTICS; PHYSICS; SEMICONDUCTOR DEVICES; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; TESTING; TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES; TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR

A substrate holding device, wherein when a substrate holder (5) allowed to swing in a rising direction on a frame (1) by the telescoping operation of a jack (19) is raised on the frame (1) by swinging, the substrate holder (5) is slid on a movement block (14) fitted to a hinge (10) for a linear guide (15) and projected beyond the edge portion (11) of a base (3), and the lower end edge of the substrate holder (5) is lowered below the edge portion (11) of the base (3) of the frame (1). Cette invention se rapporte à un dispositif de maintien de substrat, dans lequel un porte-substrat (5) pouvant basculer dans une direction montante sur un bâti (1) par le mouvement télescopique d'un vérin (19) est remonté sur le bâti (1) par basculement, le porte-substrat (5) est amené à coulisser sur un bloc de coulissement (14) monté sur une charnière (10) pour un guide linéaire (15) et à s'étendre au-delà de la partie de bord (11) d'une base, et le bord d'extrémité inférieure du porte-substrat (5) est abaissé au-dessous de la partie de bord (11) de la base (3) du bâti (1).