RESIST FILM REMOVING APPARATUS, METHOD OF REMOVING RESIST FILM, ORGANIC MATTER REMOVING APPARATUS AND METHOD OF REMOVING ORGANIC MATTER
A sheet feeding type resist removing apparatus, having substrate (111) being a cleaning object disposed therein and comprising treatment chamber (101) defining a closed space and spray nozzle (102) capable of spraying a cleaning liquid in the form of commonly-so-termed liquid drops over a surface of...
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Main Authors | , , , , , , |
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Format | Patent |
Language | English French Japanese |
Published |
23.10.2003
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Edition | 7 |
Subjects | |
Online Access | Get full text |
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