SUBSTRATE CONVEYING DEVICE

A substrate conveying device, wherein air is blown up through a plurality of air holes (4, 18, 12) formed in substrate placing tables (1, 16) and a floating block (11) to float a glass substrate (3), and the floated glass substrate (3) is conveyed while the both tip ends thereof are suckingly held a...

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Bibliographic Details
Main Authors YASUDA, MAMORU, FUJISAKI, NOBUO
Format Patent
LanguageEnglish
French
Japanese
Published 23.10.2003
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
CONVEYING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HANDLING THIN OR FILAMENTARY MATERIAL
PACKING
PERFORMING OPERATIONS
PNEUMATIC TUBE CONVEYORS
SEMICONDUCTOR DEVICES
SHOP CONVEYOR SYSTEMS
STORING
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING
TRANSPORTING
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Summary:A substrate conveying device, wherein air is blown up through a plurality of air holes (4, 18, 12) formed in substrate placing tables (1, 16) and a floating block (11) to float a glass substrate (3), and the floated glass substrate (3) is conveyed while the both tip ends thereof are suckingly held and pulled in conveying direction (C). La présente invention concerne un dispositif de transport de substrat, dans lequel de l'air est soufflé à travers plusieurs trous de passage d'air (4, 18, 12) formés dans des tables de placement de substrat (1, 16) et un bloc flottant (11) permettant de faire flotter un substrat de verre (3), et le substrat de verre (3) flotté est transporté alors que ses deux extrémités de pointe sont maintenues par succion et tirées dans une direction de transport (C).
Bibliography:Application Number: WO2003JP04835