PROCESSED BODY CARRYING DEVICE, AND PROCESSING SYSTEM WITH CARRYING DEVICE

• Main Authors: SAEKI, HIROAKI, ISHIZAWA, SHIGERU
• Format: Patent
• Language: English; French; Japanese
• Published: 10.07.2003
• Edition: 7
• Subjects: BASIC ELECTRIC ELEMENTS; CONVEYING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; HANDLING THIN OR FILAMENTARY MATERIAL; PACKING; PERFORMING OPERATIONS; PNEUMATIC TUBE CONVEYORS; SEMICONDUCTOR DEVICES; SHOP CONVEYOR SYSTEMS; STORING; TECHNICAL SUBJECTS COVERED BY FORMER USPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ARTCOLLECTIONS [XRACs] AND DIGESTS; TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING; TRANSPORTING

A main carrying device forming a part of a processing system, comprising a casing (40) forming a main carrying chamber (44) having vacuum atmosphere, the casing (40) further comprising a plurality of transfer ports (52A, 52B) for transferring the processed body (W) between the carrying chamber (44) and the outside, a mobile body (58) is slidably installed on a guide rail (48) horizontally installed in the carrying chamber (44), a linear motor mechanism (54, 62) for moving the mobile body (58) along the guide rail (48) is installed, a holding body (64) for holding the processed body (W) is liftably connected to the mobile body (58) through a support member (66), and a lifting mechanism (74) for lifting the support member (66) relative to the mobile body (58) is installed in the casing (40) at a position corresponding to the transfer ports (52A, 52B). L'invention concerne un dispositif de transport principal faisant partie d'un système de traitement, comprenant un boîtier (40) formant une chambre de transport principale (44) à vide. Le boîtier (40) présente également une pluralité d'orifices (52A, 52B) de transfert permettant de transférer le corps traité (W) de la chambre (44) de transport vers l'extérieur. Un corps mobile (58) est installé de manière horizontale dans la chambre (44) de transport. Un mécanisme (54, 62) à moteur linéaire servant à déplacer le corps mobile (58) le long du rail (48) de guidage est également installé. Un corps (64) de support destiné à porter le corps traité (W) est connecté par sustentation au corps mobile (58) par l'intermédiaire d'un élément (66) de support, et un mécanisme (74) de levage destiné à soulever l'élément (66) de support par rapport au corps mobile (58) est installé dans le boîtier (40) sur une position correspondant aux orifices (52A, 52B) de transfert.