NOVEL TIP OPTICAL EFFECTS FOR PRODUCING PHOTOSENSITIVE POLYMER NANOSTRUCTURES, USES IN NANOPHOTOLITHOGRAPHY AND HIGH DENSITY DATA STORAGE

The invention concerns production of nanostructures on polymers for applications in nanophotolithography and high-density data storage. The corresponding nanoobjects are obtained through improved tip optical effects, the tips acting as so-called opening-free nanosources. The novel techniques of loca...

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Bibliographic Details
Main Authors BACHELOT, RENAUD, ROYER, PASCAL
Format Patent
LanguageEnglish
French
Published 05.06.2003
Edition7
Subjects
APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]
MANUFACTURE OR TREATMENT THEREOF
MEASURING
NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS,MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES ASDISCRETE UNITS
NANOTECHNOLOGY
PERFORMING OPERATIONS
PHYSICS
SCANNING-PROBE TECHNIQUES OR APPARATUS
TESTING
TRANSPORTING
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Summary:The invention concerns production of nanostructures on polymers for applications in nanophotolithography and high-density data storage. The corresponding nanoobjects are obtained through improved tip optical effects, the tips acting as so-called opening-free nanosources. The novel techniques of local photopolymerisation are also used to photoinduce in specific polymers non-linear, photoluminescent and locally conductive or insulating properties. The applications in nanophotolithography also concerns integrated electro-optical functions, source matrices, and more generally a wide variety of substrates for use in nanoelectronics. L'invention concerne la réalisation de nanostructures sur polymíres pour des applications de nanophotolithographie et de stockage de-l'information à trís haute densité. Les nanoobjets correspondants sont obtenus à partir de procédés améliorés à effets optiques de pointes, les pointes se comportant comme des nanosources dites « sans ouverture ». Les nouvelles techniques de photopolymérisation locale sont également mises en oeuvre pour photoinduire dans des polymíres spécifiques des propriétés non linéaires, photoluminescentes et localement conductrices ou isolantes. Les applications de nanophotolithographie selon l'invention concernent également des fonctions éléctrooptiques intégrées, des matrices de source, et plus généralement une grande diversité de substrats utilisables en nanoélectronique.
Bibliography:Application Number: WO2002FR04120