METHOD FOR IDENTIFYING SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE, METHOD FOR MANUFACTURING SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE, SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND SEMICONDUCTOR CHIP

• Main Author: MURANAKA, MASAYA
• Format: Patent
• Language: English; French; Japanese
• Published: 06.06.2002
• Edition: 7
• Subjects: BASIC ELECTRIC ELEMENTS; CALCULATING; COMPUTING; COUNTING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; HANDLING RECORD CARRIERS; PHYSICS; PRESENTATION OF DATA; RECOGNITION OF DATA; RECORD CARRIERS; SEMICONDUCTOR DEVICES

In the manufacturing process of a semiconductor integrated circuit device, a plurality of identification elements having the same arrangement are formed and the relation of magnitude in a physical quantity corresponding to variation in the process of the plurality of identification elements is emplo...