METHOD FOR IDENTIFYING SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE, METHOD FOR MANUFACTURING SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE, SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND SEMICONDUCTOR CHIP

In the manufacturing process of a semiconductor integrated circuit device, a plurality of identification elements having the same arrangement are formed and the relation of magnitude in a physical quantity corresponding to variation in the process of the plurality of identification elements is emplo...

Full description

Saved in:
Bibliographic Details
Main Author MURANAKA, MASAYA
Format Patent
LanguageEnglish
French
Japanese
Published 06.06.2002
Edition7
Subjects
Online AccessGet full text

Cover

Loading…
More Information
Summary:In the manufacturing process of a semiconductor integrated circuit device, a plurality of identification elements having the same arrangement are formed and the relation of magnitude in a physical quantity corresponding to variation in the process of the plurality of identification elements is employed as identification information specific to the semiconductor integrated circuit device. Pour la fabrication d'un dispositif à circuit intégré à semi-conducteur, on forme une pluralité d'éléments d'identification présentant le même agencement et l'on utilise le rapport de grandeur dans une quantité physique correspondant à la variation du processus de fabrication desdits éléments d'identification en tant qu'information d'identification propre au dispositif à circuit intégré à semi-conducteur.
Bibliography:Application Number: WO2001JP07727