METHOD AND APPARATUS FOR EVALUATING INTEGRATED CIRCUIT PACKAGES HAVING THREE DIMENSIONAL FEATURES

The present invention provides for methods and apparatus for evaluating objects having three dimensional features. One method involve using both two dimensional data sets to improve the processing of three dimensional data sets. The two dimensional data set can be used to pre-qualify the three dimen...

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Bibliographic Details
Main Authors SCARPINE, VICTOR, LEONARD, PATRICK, F, EVANS, FRANK
Format Patent
LanguageEnglish
French
Published 11.04.2002
Edition7
Subjects
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