NOVEL STRAIN FOR DECOMPOSING TMAH, AND METHOD OF WASTEWATER TREATMENT USING THE SAME
The present invention describes a wastewater treatment method by a microorganism decomposing Tetramethyl Ammonium Hydroxide (TMAH) which, utilized in etching the surface of silicone chip in semiconductor manufacturing process, is toxic and hard to decomposed. The present invention provides novel mic...
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Main Authors | , , , , , , , , , |
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Format | Patent |
Language | English French |
Published |
31.01.2002
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Edition | 7 |
Subjects | |
Online Access | Get full text |
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