LOW DIELECTRIC CONSTANT MATERIALS AND METHODS OF PREPARATION THEREOF
The present invention is directed to low dielectric polymers and to methods of producing these low dielectric constant polymers, dielectric materials and layers, and electronic components. In one aspect of the present invention, an isomeric mixture of thermosetting monomers, wherein the monomers hav...
Saved in:
Main Authors | , , , , , , , |
---|---|
Format | Patent |
Language | English French |
Published |
17.10.2002
|
Edition | 7 |
Subjects | |
Online Access | Get full text |
Cover
Loading…
Abstract | The present invention is directed to low dielectric polymers and to methods of producing these low dielectric constant polymers, dielectric materials and layers, and electronic components. In one aspect of the present invention, an isomeric mixture of thermosetting monomers, wherein the monomers have a core structure and a plurality of arms, is provided, and the isomeric mixture of thermosetting monomers is polymerized, wherein polymerization comprises a reaction of an ethynyl group that is located in at least one arm of a monomer. In yet another aspect of the inventive subject matter, spin-on low dielectric constant materials are formed having a first backbone with an aromatic moiety and a first reactive group, and a second backbone with an aromatic moiety and a second reactive group, wherein the first and second backbone are crosslinked via the first and second reactive groups in a crosslinking reaction preferably without an additional crosslinker, and wherein a cage structure having at least eight (8) atoms is covalently bound to at least one of the first and second backbone.
L'invention concerne des polymères faiblement diélectriques et des procédés de production de ces derniers, des matières et des couches diélectriques et des composants électroniques. L'invention, dans un mode de réalisation, concerne un mélange isomère de monomères thermodurcissables, les monomères comportant une structure de noyau et plusieurs bras. Le mélange isomère de monomères thermodurcissables est polymérisé, la polymérisation comprenant une réaction d'un groupe éthynyle situé dans au moins un bras d'un monomère. Dans un autre mode de réalisation, des matières à faible constante diélectrique appliquées par centrifugation sont formées, matières comprenant un premier squelette doté d'une fraction aromatique et d'un premier groupe réactif, et un second squelette doté d'une fraction aromatique et d'un second groupe réactif, le premier et le second squelette étant réticulés par le premier et le second groupe réactif dans une réaction de réticulation, de préférence sans réticulant additionnel, et une structure de cage à au moins huit (8) atomes étant liée par covalence à au moins un des squelettes. |
---|---|
AbstractList | The present invention is directed to low dielectric polymers and to methods of producing these low dielectric constant polymers, dielectric materials and layers, and electronic components. In one aspect of the present invention, an isomeric mixture of thermosetting monomers, wherein the monomers have a core structure and a plurality of arms, is provided, and the isomeric mixture of thermosetting monomers is polymerized, wherein polymerization comprises a reaction of an ethynyl group that is located in at least one arm of a monomer. In yet another aspect of the inventive subject matter, spin-on low dielectric constant materials are formed having a first backbone with an aromatic moiety and a first reactive group, and a second backbone with an aromatic moiety and a second reactive group, wherein the first and second backbone are crosslinked via the first and second reactive groups in a crosslinking reaction preferably without an additional crosslinker, and wherein a cage structure having at least eight (8) atoms is covalently bound to at least one of the first and second backbone.
L'invention concerne des polymères faiblement diélectriques et des procédés de production de ces derniers, des matières et des couches diélectriques et des composants électroniques. L'invention, dans un mode de réalisation, concerne un mélange isomère de monomères thermodurcissables, les monomères comportant une structure de noyau et plusieurs bras. Le mélange isomère de monomères thermodurcissables est polymérisé, la polymérisation comprenant une réaction d'un groupe éthynyle situé dans au moins un bras d'un monomère. Dans un autre mode de réalisation, des matières à faible constante diélectrique appliquées par centrifugation sont formées, matières comprenant un premier squelette doté d'une fraction aromatique et d'un premier groupe réactif, et un second squelette doté d'une fraction aromatique et d'un second groupe réactif, le premier et le second squelette étant réticulés par le premier et le second groupe réactif dans une réaction de réticulation, de préférence sans réticulant additionnel, et une structure de cage à au moins huit (8) atomes étant liée par covalence à au moins un des squelettes. |
Author | LIU, FENG QUAN KOROLEV, BORIS ZHEREBIN, RUSLAN LEUNG, ROGER APEN, PAUL NALEWAJEK, DAVID LAU, KREISLER BROUK, EMMA |
Author_xml | – fullname: BROUK, EMMA – fullname: LAU, KREISLER – fullname: NALEWAJEK, DAVID – fullname: ZHEREBIN, RUSLAN – fullname: LIU, FENG QUAN – fullname: APEN, PAUL – fullname: LEUNG, ROGER – fullname: KOROLEV, BORIS |
BookMark | eNqNyksKwjAQANAsdOHvDuMBhNYfbodkQgJppiQDXZYicSVtod4fNx7A1du8rVqN01g2ygTuwHgKpCV5DZpjFowCDQoljyEDRgMNiWOTgS20iVpMKJ4jiKNEbPdq_RreSzn83KmjJdHuVOapL8s8PMtYPn3H1bl61LfrHevLP-cLe7YtrQ |
ContentType | Patent |
DBID | EVB |
DatabaseName | esp@cenet |
DatabaseTitleList | |
Database_xml | – sequence: 1 dbid: EVB name: esp@cenet url: http://worldwide.espacenet.com/singleLineSearch?locale=en_EP sourceTypes: Open Access Repository |
DeliveryMethod | fulltext_linktorsrc |
Discipline | Medicine Chemistry Sciences |
DocumentTitleAlternate | MATIERES A FAIBLE CONSTANTE DIELECTRIQUE ET LEURS PROCEDES DE PREPARATION |
Edition | 7 |
ExternalDocumentID | WO02081546A1 |
GroupedDBID | EVB |
ID | FETCH-epo_espacenet_WO02081546A13 |
IEDL.DBID | EVB |
IngestDate | Fri Jul 19 16:46:07 EDT 2024 |
IsOpenAccess | true |
IsPeerReviewed | false |
IsScholarly | false |
Language | English French |
LinkModel | DirectLink |
MergedId | FETCHMERGED-epo_espacenet_WO02081546A13 |
Notes | Application Number: WO2001US32569 |
OpenAccessLink | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20021017&DB=EPODOC&CC=WO&NR=02081546A1 |
ParticipantIDs | epo_espacenet_WO02081546A1 |
PublicationCentury | 2000 |
PublicationDate | 20021017 |
PublicationDateYYYYMMDD | 2002-10-17 |
PublicationDate_xml | – month: 10 year: 2002 text: 20021017 day: 17 |
PublicationDecade | 2000 |
PublicationYear | 2002 |
RelatedCompanies | LIU, FENG QUAN KOROLEV, BORIS HONEYWELL INTERNATIONAL INC ZHEREBIN, RUSLAN LEUNG, ROGER APEN, PAUL NALEWAJEK, DAVID LAU, KREISLER BROUK, EMMA |
RelatedCompanies_xml | – name: APEN, PAUL – name: NALEWAJEK, DAVID – name: BROUK, EMMA – name: HONEYWELL INTERNATIONAL INC – name: ZHEREBIN, RUSLAN – name: LAU, KREISLER – name: LEUNG, ROGER – name: LIU, FENG QUAN – name: KOROLEV, BORIS |
Score | 2.5649686 |
Snippet | The present invention is directed to low dielectric polymers and to methods of producing these low dielectric constant polymers, dielectric materials and... |
SourceID | epo |
SourceType | Open Access Repository |
SubjectTerms | ACYCLIC OR CARBOCYCLIC COMPOUNDS ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAININGELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN,SULFUR, SELENIUM OR TELLURIUM BASIC ELECTRIC ELEMENTS CHEMISTRY COMPOSITIONS BASED THEREON COMPOSITIONS OF MACROMOLECULAR COMPOUNDS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVINGCARBON-TO-CARBON UNSATURATED BONDS MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONSONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS METALLURGY ORGANIC CHEMISTRY ORGANIC MACROMOLECULAR COMPOUNDS SEMICONDUCTOR DEVICES THEIR PREPARATION OR CHEMICAL WORKING-UP |
Title | LOW DIELECTRIC CONSTANT MATERIALS AND METHODS OF PREPARATION THEREOF |
URI | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20021017&DB=EPODOC&locale=&CC=WO&NR=02081546A1 |
hasFullText | 1 |
inHoldings | 1 |
isFullTextHit | |
isPrint | |
link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV3dT8IwEL8QNOqbokbwIzUxe1vUsQ94WMxouwyzrQSq8EbYVhJ9GERm_Pe9DRBf9K1pk-Z66fV-v2t7B3CXZOjkEmeG3CTt6KZtJfrM7Br63FAzp8yu0q2uC6LYDl7M54k1qcH79i9MlSf0q0qOiBaVor0X1Xm93AWxWPW2cnWfvGHX4smXLtO27Ngod5jGei4fCCaoRinyNi0eumUtSkQLtodMaa-E0WWeff7aK3-lLH-7FP8Y9gc4W16cQE3lDTik28prDTiINhfe2NzY3uoUWCjGBNFbyKkc9imhIh5JL5Yk8hCS9r1wRLyYkYjLQLARET5B7Q68dRCKyIAPufDP4NbnkgY6ijP9Wft0LHaSt8-hni9ydQHEMFRnnpopgjEHKUe7Yykjs2wHVWxlXTVvQuvveVr_DV7C0brgyYP-6FxBvfj4VNfod4vkplLYNz2_gGg |
link.rule.ids | 230,309,786,891,25594,76903 |
linkProvider | European Patent Office |
linkToHtml | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV3dT8IwEL8QNOKbokbxqyZmb4s69gEPxIx2y9BtJVCFN7KNkujDIDLjv--tgPiib02bXK6XXu9-194dwG06RSOXOglik6ylm7aV6onZNvSZIROnrK7SVs8FUWwHL-bT2BpX4H2TC6PqhH6p4oioURnqe6Hu68U2iMXU38rlXfqGU_NHX3SYtkHHRnnCNNbteH3OONUoRdymxYNO2YsSvQXbRaS04yAkVFDptVtmpSx-mxT_AHb7SC0vDqEi8zrU6KbzWh32ovWDNw7Xurc8AhbyEUHvLfSoGPQooTweCjcWJHLRJe254ZC4MSORJwLOhoT7BKXbd1dBKCICb-Bx_xhufE_QQEd2Jj97n4z4lvPmCVTzeS5PgRiGbM0yM0NnzEHI0WxZ0phatoMitqZtOTuDxt90Gv8tXkMtEFE4CXvx8znsr5qf3OsPzgVUi49PeYk2uEivlPC-AWP5g1I |
openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Apatent&rft.title=LOW+DIELECTRIC+CONSTANT+MATERIALS+AND+METHODS+OF+PREPARATION+THEREOF&rft.inventor=BROUK%2C+EMMA&rft.inventor=LAU%2C+KREISLER&rft.inventor=NALEWAJEK%2C+DAVID&rft.inventor=ZHEREBIN%2C+RUSLAN&rft.inventor=LIU%2C+FENG+QUAN&rft.inventor=APEN%2C+PAUL&rft.inventor=LEUNG%2C+ROGER&rft.inventor=KOROLEV%2C+BORIS&rft.date=2002-10-17&rft.externalDBID=A1&rft.externalDocID=WO02081546A1 |