SYSTEM AND METHOD FOR UTILIZATION OF WASTE HEAT OF SEMICONDUCTOR EQUIPMENT AND HEAT EXCHANGER USED FOR UTILIZATION OF WASTE HEAT OF SEMICONDUCTOR EQUIPMENT

• Main Authors: SUENAGA, OSAMU, KOBAYASHI, SADAO
• Format: Patent
• Language: English; French; Japanese
• Published: 29.08.2002
• Edition: 7
• Subjects: BASIC ELECTRIC ELEMENTS; BLASTING; CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEATGENERATING MEANS, IN GENERAL; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; HEAT EXCHANGE IN GENERAL; HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS,IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT; HEATING; LIGHTING; MECHANICAL ENGINEERING; RANGES; SEMICONDUCTOR DEVICES; TECHNICAL SUBJECTS COVERED BY FORMER USPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ARTCOLLECTIONS [XRACs] AND DIGESTS; TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE; VENTILATING; WEAPONS

A waste heat utilization system of a semiconductor equipment, wherein the coolant discharged from the semiconductor equipment is used as the heat source of the other semiconductor equipment to reduce an energy consumption in an entire semiconductor equipment, the coolant of 80 DEG C discharged from the heating furnace of a heat treatment device (10) is fed to the ultrapure water heating device (32) of a cleaning device (30), the ultrapure water heating device (32) heats the ultrapure water of room temperature to 60 ° C by the heat exchange with the coolant of 80 DEG C, and the coolant used for the heat exchange to increase the temperature to 30 DEG C is re-utilized for the cooling of the heating furnace (12). La présente invention concerne un système d'exploitation de la chaleur perdue d'un équipement semi-conducteur. Le fluide caloporteur évacué de l'équipement semi-conducteur sert de source de chaleur pour l'autre équipement semi-conducteur, ce qui permet de réduire la consommation d'énergie dans un équipement semi-conducteur complet. Le fluide caloporteur à 80 °C évacué du four de chauffage d'un dispositif de traitement de la chaleur (10) est conduit au dispositif de chauffage d'eau ultrapure (32) d'un dispositif de nettoyage (30), le dispositif de chauffage d'eau ultrapure (32) chauffe l'eau ultrapure de la température ambiante à 60 °C, au moyen de l'échange thermique avec le fluide caloporteur à 80 °C, puis le fluide caloporteur utilisé pour l'échange thermique afin d'augmenter la température à 30 °C est réutilisé en vue de refroidir le four de chauffage (12).