DETERGENT COMPOSITION
A detergent composition which is less apt to corrode wiring materials and is highly effective in cleansing a semiconductor substrate or semiconductor element having fine particles or impurity metal particles adherent thereto. The detergent composition contains a reducing agent and has an oxidation-r...
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Main Authors | , |
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Format | Patent |
Language | English French Japanese |
Published |
20.12.2001
|
Edition | 7 |
Subjects | |
Online Access | Get full text |
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