SCANNING ELECTRON MICROSCOPE

• Main Authors: TODOKORO, HIDEO, SUZUKI, NAOMASA, EZUMI, MAKOTO, OSE, YOICHI
• Format: Patent
• Language: English; French; Japanese
• Published: 11.10.2001
• Edition: 7
• Subjects: APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]; BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY; MEASURING; PHYSICS; SCANNING-PROBE TECHNIQUES OR APPARATUS; TESTING

A scanning electron microscope with an energy filter which can positively utilize secondary electrons and/or reflected electrons which collide against a mesh electrode and are lost. The scanning electron microscope which has a porous electrode for producing an electric field for energy-filtering ele...