METHOD AND SYSTEM FOR THE EXAMINATION OF SPECIMEN USING A CHARGED PARTICLE BEAM

• Main Authors: GOLDENSHTEIN, ALEX, ADAMEC, PAVEL, HAAS, NADAV, BEN-AV, RADEL, PEARL, ASHER, PETROV, IGOR
• Format: Patent
• Language: English; French
• Published: 21.06.2001
• Edition: 7
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; SEMICONDUCTOR DEVICES; TESTING

The present invention provides a method for the examination of specimen with a beam of charged particles. The method provides one or more images of the specimen made with different view angles, so that, compared to a single image of the specimen, a lot of additional information about the specimen ca...