A POLISHING PAD HAVING A WATER-REPELLANT FILM THEREON AND A METHOD FOR MANUFACTURING THE SAME

The present invention provides a polishing pad (200). The polishing pad includes a base pad (220), such as a felt pad, having an outer surface, and a water-repellant film (250) located on the outer surface. The water-repellant film (250) typically provides the base pad (220) with a water absorbency...

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Bibliographic Details
Main Author OBENG, YAW, S
Format Patent
LanguageEnglish
French
Published 11.01.2001
Edition7
Subjects
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Summary:The present invention provides a polishing pad (200). The polishing pad includes a base pad (220), such as a felt pad, having an outer surface, and a water-repellant film (250) located on the outer surface. The water-repellant film (250) typically provides the base pad (220) with a water absorbency factor of less than about five percent. In another embodiment, the polishing pad has an outer surface having an outer edge and first and second opposing surfaces joined by the outer edge. The polishing pad (200), in a preferred embodiment, has the water-repellant film (250) located on the outer edge and one of the first and second opposing surfaces. Located on the water-repellant film (250) on one of the first and second opposing surfaces, in another embodiment, is a pressure sensitive adhesive (260). Cette invention se rapporte à un tampon de polissage (200), qui est constitué par un tampon de base (220), tel qu'un tampon de feutre, comportant une surface externe et un film hydrofuge (250) situé sur cette surface externe. Le film hydrofuge (250) confère généralement au tampon de base (220) un facteur d'absorbance de l'eau inférieur à environ 5 %. Dans un autre mode de réalisation, ce tampon de polissage possède une surface extérieure comportant un bord extérieur et des première et seconde surfaces opposées jointes par ce bord extérieur. Dans un mode de réalisation préféré, le film hydrofuge (250) est situé sur le bord extérieur et sur l'une des première et seconde surfaces opposées du tampon de polissage (200). Dans un autre mode de réalisation, un adhésif autocollant (260) est placé sur le film hydrofuge (250) sur l'une des première et seconde surfaces opposées.
Bibliography:Application Number: WO2000US05117