Antireflection coating for a temperature sensitive substrate
A multilayer antireflection coating for a temperature sensitive substrate such as plastic. One layer is a DC reactively sputtered metal oxide which may be deposited quickly and without imparting a large amount of heat to the substrate. Another layer has a refractive index lower than the substrate.
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
01.08.2006
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Subjects | |
Online Access | Get full text |
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Summary: | A multilayer antireflection coating for a temperature sensitive substrate such as plastic. One layer is a DC reactively sputtered metal oxide which may be deposited quickly and without imparting a large amount of heat to the substrate. Another layer has a refractive index lower than the substrate. |
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Bibliography: | Application Number: US19970914868 |