Parallel optical examinations of a sample
A first output light beam (L2) that originates from a total internal reflection at a detection surface (111) of a total internal reflection TIR chamber (110) and a second output light beam (L2′) that comes from the interior of an inspectable chamber (120, 220, 320, 420, 520, 620) are both received w...
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
29.05.2018
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Subjects | |
Online Access | Get full text |
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Summary: | A first output light beam (L2) that originates from a total internal reflection at a detection surface (111) of a total internal reflection TIR chamber (110) and a second output light beam (L2′) that comes from the interior of an inspectable chamber (120, 220, 320, 420, 520, 620) are both received within an observation region (OR). Preferably, these output light beams are detected with the same light detector, e.g. an image sensor (12). A total internal reflection at the TIR chamber and reflected light from inside the inspectable chamber are both directed to the same observation region (OR). This is for example enabled by different inclinations of the windows encountered by the first and the second output light beams, by different optical elements (407) in the paths of the output light beams, and/or by light scattering surface structures (122, 223, 322, 422, 522, 622) in the inspectable chamber. |
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Bibliography: | Application Number: US201214355462 |