Semiconductor device and manufacturing method

• Main Authors: Sonsky Jan, Donkers Johannes Josephus Theodorus Marinus, Heil Stephan Bastiaan Simon
• Format: Patent
• Language: English
• Published: 13.03.2018
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A semiconductor device comprising at least one active layer on a substrate and a first contact to the at least one active layer, the first contact comprising a metal in contact with the at least one active layer and a capping layer on the metal, the capping layer comprising a diffusion barrier, wher...