Solid state imaging apparatus, production method thereof and electronic device
A solid state imaging apparatus includes an insulation structure formed of an insulation substance penetrating through at least a silicon layer at a light receiving surface side, the insulation structure having a forward tapered shape where a top diameter at an upper portion of the light receiving s...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
16.01.2018
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Subjects | |
Online Access | Get full text |
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Summary: | A solid state imaging apparatus includes an insulation structure formed of an insulation substance penetrating through at least a silicon layer at a light receiving surface side, the insulation structure having a forward tapered shape where a top diameter at an upper portion of the light receiving surface side of the silicon layer is greater than a bottom diameter at a bottom portion of the silicon layer. Also, there are provided a method of producing the solid state imaging apparatus and an electronic device including the solid state imaging apparatus. |
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Bibliography: | Application Number: US201615337216 |