Methods and systems for managing semiconductor manufacturing equipment

• Main Authors: Cho Junghyun, Kwon Ohyung, Baek Kye Hyun, Park Haejoong
• Format: Patent
• Language: English
• Published: 16.01.2018
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY

Provided are methods and systems for managing semiconductor manufacturing equipment. A method may include preventive maintenance involving steps of disassembling, cleaning, and assembling parts of a chamber. The assembling of the parts may include checking whether the parts are correctly assembled,...